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Grades 6–8 · Machines

How does a scanning electron microscope build a surface image?

A scanning electron microscope, or SEM, reveals surface detail too small for an ordinary light microscope to show clearly. It sends a focused beam of electrons toward a specimen inside a chamber. Electron optics shape the beam, and scanning coils move its landing point across the surface in rows.

M51 visual explanationSelected scan position 5 of nine invented samples. Secondary electrons from the specimen supply the detector signal assigned to the matching display pixel. Display brightness is not a direct measure of surface height.Scanning links a surface point to an image pixelElectron beamScancoilsDetectorSpecimen surfaceImage pixelsSignal: 80 / 100Pixel gray: 204 / 255Invented samples; brightness is not a height ruler

In the diagramScanning links a surface point to an image pixelElectron beamScancoilsDetectorSpecimen surfaceImage pixelsSignal: 80 / 100Pixel gray: 204 / 255Invented samples; brightness is not a height ruler

The beam scans the specimen and the secondary-electron detector supplies a signal. The selected center sample, 80 out of 100, becomes the matching bright center pixel.

Electrons in the beam interact with the specimen. Some of those interactions release low-energy secondary electrons close to its surface. A detector collects a signal from these escaping electrons. As the beam moves, the instrument keeps track of both its position and the detector response.

The display assigns each sampled position a pixel. A stronger selected signal becomes a brighter pixel in the simple mapping shown here. Our invented nine-point scan has a center signal of 80 on a scale from zero to 100, so the center pixel is bright. The result is assembled position by position rather than taken as one visible-light photograph.

Surface slope and edges can affect the signal, but brightness is not a direct height ruler. Material, detector arrangement and settings also matter. Ordinary SEM images are often grayscale; added color may be a presentation choice. Other SEM detectors collect different signals. This explanation follows secondary electrons leaving the surface, rather than electrons transmitted through a thin specimen.

About this explanation

Starting knowledge: Understand that a digital image is made of pixels and a detector converts an interaction into a measured signal.

Sources

  • JEOL — Scanning Electron Microscopes (SEM): Instrument Basics
  • JEOL — Scanning Electron Microscope A To Z
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